发明名称 SAMPLE HOLDER, CHARGED PARTICLE BEAM DEVICE AND OBSERVING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sample holder that can execute a series of observations from achievement of rotation series images of any angles around the x-axis of an observation area, that is, from -180° to +180° till achievement of rotation series images of any angles around the y-axis, that is, from -180° to +180° without taking out the sample from a sample chamber.SOLUTION: A sample holder has a power unit, a power separator, a rotational motion transfer mechanism and a translation movement transfer mechanism. The power separator separates one motion of the power unit and distributes the separated motion to the rotational motion transfer mechanism and the translation movement transfer mechanism. The rotational motion transfer mechanism gives a rotational motion around a second rotational axis. The translation motion transfer mechanism gives a translation movement of the second rotational axis.SELECTED DRAWING: Figure 14
申请公布号 JP2016031805(A) 申请公布日期 2016.03.07
申请号 JP20140152939 申请日期 2014.07.28
申请人 HITACHI LTD 发明人 SHIMAKURA TOMOKAZU;TAKAHASHI YOSHIO;KASHIMA HIDEO
分类号 H01J37/20 主分类号 H01J37/20
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