| 摘要 |
PROBLEM TO BE SOLVED: To provide an edge position measurement device with which it is possible to reduce the number of edge reference positions set on a calibration board and correct an edge position between calibration points by using a CCD camera in which the optical axis is tilted a preset angle relative to the vertical direction of a measurement reference plane.SOLUTION: The present invention is an edge position detection device 30 equipped with a CCD camera 1, a calibration board 14, and an edge position arithmetic unit 2 for referring to a calibration table 22a when calculating, wherein the optical axis of the CCD camera 1 is tilted a preset angle relative to the vertical axis of the measurement reference plane of an object to be measured and the CCD camera 1 is set so as to always capture the image of the lower end corner of an object 13a to be measured in the edge position measurement range of the CCD camera 1, and the edge position detection device 30 refers to the calibration table 22a and a virtual calibration point error table 23a and virtually increases the number of calibration points for the edge position of the object to be measured that corresponds to the camera pixel address detected by the CCD camera 1, and reduces an error in edge position measurement.SELECTED DRAWING: Figure 2 |
