发明名称 SUBSTRATE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a substrate and a manufacturing method of the same.SOLUTION: In a manufacturing method of a substrate with a bump, by controlling a thickness of a nickel layer 150 on a copper layer 140 after at least one copper layer 140 is formed on a semiconductor substrate 110, hardness of the bump composed of the copper layer 140 and the nickel layer 150 meets a required standard after an anneal process thereby to prevent burst of a glass substrate 200 when the substrate having the bump is associated with the glass substrate 200 by flip chip.SELECTED DRAWING: Figure 2
申请公布号 JP2016032090(A) 申请公布日期 2016.03.07
申请号 JP20140182182 申请日期 2014.09.08
申请人 CHIPBOND TECHNOLOGY CORP 发明人 WU FEI JAIN;LIAO TSANG-SHENG;HUANG CHING-YI;LEE CHUN-TE
分类号 H01L21/60 主分类号 H01L21/60
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