LIQUID DISCHARGE APPARATUS, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a liquid discharge apparatus capable of detecting abnormality.SOLUTION: A liquid discharge apparatus includes: a storage chamber 12 divided by a dividing member 14 into a first chamber 15 configured to store a first liquid to be discharged from a discharge port 11 and a second chamber 16 configured to store a second liquid; a supply unit configured to supply the second liquid into the second chamber 16 in accordance with a decrease of the first liquid stored in the first chamber 15; and a measurement unit 20 configured to measure a flow of the first liquid into the second chamber 16. The measurement unit 20 can detect abnormality by measuring a refractive index of a liquid in a measurement area 22, and a control unit determines the occurrence of breakage (abnormality) in the dividing member 14 on the basis of a measurement result from the measurement unit 20.SELECTED DRAWING: Figure 3