| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate with a transparent electrode which accelerates crystallization by a heat treatment, suppresses crystallization at ordinary temperature and achieves high light transmittance at the same time.SOLUTION: In a substrate with a transparent electrode, a ground layer 200 and a transparent electrode thin film 300 are formed, in order, on a transparent film substrate 100, and the ground layer 200 is based on zinc oxide, has a film thickness of 0.5-8 nm and contains 1-4 wt.% of silicon oxide. The transparent electrode thin film 300 functions as a conductive layer, and the ground layer 200 is film-formed by sputtering so as to be high in resistivity.SELECTED DRAWING: Figure 1 |
