SUBSTRATE FOR LIQUID DISCHARGE HEAD AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a substrate for a liquid discharge head which achieves refill characteristics and strength of a division wall located between supply passages.SOLUTION: An embodiment of the invention relates to a substrate for a liquid discharge head including: a silicon substrate having a first surface and a second surface at the opposite side of the first surface; a discharge energy generation element disposed on the first surface of the silicon substrate; and supply passages penetrating through the first surface and the second surface of the silicon substrate. Each supply passage comprises: a first opening part opening on the first surface; a second opening part leading to a second surface side opening of the first opening part; and a third opening part which leads to a second surface side opening of the second opening part and opens on the second surface. The second surface side opening of the second opening part is wider than the first surface side opening of the second opening part. The third opening part has a side wall which is substantially perpendicular to a substrate surface.SELECTED DRAWING: Figure 1