发明名称 SCRUBBER FOR TREATING PROCESSING WASTE GAS
摘要 The present invention relates to a scrubber for treating a process waste gas, capable of treating a water-soluble gas included in a process waste gas by using a urea material. To this end, the scrubber for treating a process waste gas includes: a plasma treatment part allowing plasma to come in contact with a process waste gas to decompose the process waste gas; a cooling part cooling the process waste gas decomposed in the plasma treatment part and introduced from the plasma process part to collect by-products of reaction; and a reaction part having a reaction housing into which the process waste gas is introduced from the cooling part and of which the inside is hollow, and an urea particle layer which is positioned inside the reaction housing and is in contact with the process waste gas.
申请公布号 KR20160024234(A) 申请公布日期 2016.03.04
申请号 KR20140110823 申请日期 2014.08.25
申请人 GNBS ENGINEERING CO., LTD. 发明人 PARK, SANG SOON
分类号 H01L21/02;H05H1/46 主分类号 H01L21/02
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