| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique to efficiently perform scanning by probe light radiating terahertz waves.SOLUTION: An inspection device 100 inspects a solar battery 9 on which an electrode wiring pattern is formed. The inspection device 100 comprises: a sample table 4 for holding the solar battery 9; a stage driving mechanism 31 for scanning the solar battery 9 by pulse light LP11 by moving the sample table 4 in an X-axis direction and a Y-axis direction; and a terahertz-wave detection unit 23 for detecting a terahertz-wave pulse LT1 radiated by the solar battery 9 in response to the irradiation of the pulse light LP11. In addition, the inspection device 100 comprises: a wiring pattern information acquisition unit 711 for acquiring wiring pattern information 83 indicating the position of a bus-bar electrode 93; and a control unit 7 for controlling the stage driving mechanism 31 so as to scan, by the pulse light LP11, a region of the solar battery 9 excluding at least part of the wiring pattern on the basis of the wiring pattern information 83.SELECTED DRAWING: Figure 4 |
