发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 Improvement in yield of a semiconductor device is obtained. In addition, increase in service life of a socket terminal is obtained. A projecting portion PJ1 and a projecting portion PJ2 are provided in an end portion PU of a socket terminal STE1. Thus, it is possible to enable contact between a lead and the socket terminal STE in which a large current is caused to flow, at two points by a contact using the projecting portion PJ1 and by a contact using the projecting portion PJ2, for example. As a result, the current flowing from the socket terminal STE1 to the lead flows by being dispersed into a path flowing in the projecting portion PJ1 and a path flowing in the projecting portion PJ2. Accordingly, it is possible to suppress increase of temperature of a contact portion between the socket terminal STE1 and the lead even in a case where the large current is caused to flow between the socket terminal STE1 and the lead.
申请公布号 US2016064291(A1) 申请公布日期 2016.03.03
申请号 US201314783851 申请日期 2013.04.11
申请人 RENESAS ELECTRONICS CORPORATION 发明人 Ishii Toshitsugu;Makihira Naohiro;Iwasaki Hidekazu;Matsuhashi Jun
分类号 H01L21/66;H01L25/00 主分类号 H01L21/66
代理机构 代理人
主权项 1. A method of manufacturing a semiconductor device, comprising the steps of: (a) electrically connecting a first semiconductor chip with a first external terminal, and electrically connecting the first semiconductor chip with a second external terminal; (b) after the step (a), sealing the first semiconductor chip such that a part of each of the first external terminal and the second external terminal is exposed, and forming a sealing body; (c) after the step (b), forming a first conductive film on the part of the first external terminal exposed from the sealing body, and forming a second conductive film on the part of the second external terminal exposed from the sealing body; (d) after the step (c), disposing a device to be inspected, manufactured through the steps (a) to (c), in a housing portion of a socket, contacting a first socket terminal provided in the socket with the first external terminal via the first conductive film, and contacting a second socket terminal provided in the socket with the second external terminal via the second conductive film; and (e) after the step (d), supplying a first current value to between the first socket terminal and the second socket terminal for a first time, and inspecting an electrical characteristic of the first semiconductor chip, wherein each of the first socket terminal and the second socket terminal includes: a main body portion including a support portion,a plate-like portion connected to the support portion, and including an end portion projected toward the device, anda plurality of projecting portions integrally provided in the end portion.
地址 Koutou-ku, Tokyo JP