SOLID PARTICULATE RECOVERY/REMOVAL DEVICE, LIQUID MANAGEMENT DEVICE, AND ETCHING LIQUID MANAGEMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a solid particulate recovery/removal device which achieves space saving and shortens the processing time, and to provide a liquid management device including the solid particulate recovery/removal device and an etching liquid management device.SOLUTION: A solid particulate recovery/removal device includes: a casing 35 formed into a cylindrical shape: a center shaft 36a provided in the casing 35; a screw blade 36b which is provided in a spiral manner around the center shaft 36a and located close to an inner wall of the casing 35; an inflow port for supplying a liquid containing solid particles and a discharge port for discharging the liquid; and a solid particle discharge pipe which discharges the solid particles from the casing 35. The solid particle discharge pipe is provided above the inflow port and the discharge port. The casing 35 is disposed forming a predetermine angle. A motor 37 rotates the screw blade 36b to transport the solid particles in the liquid from the liquid in the casing 35 to the solid particle discharge pipe.SELECTED DRAWING: Figure 1