Selective Deposition With Alcohol Selective Reduction And Protection

摘要

Methods of selectively depositing a metal selectively onto a metal surface relative to a dielectric surface. Methods include reducing a metal oxide surface to a metal surface and protecting a dielectric surface to minimize deposition thereon.

主权项

1. A method of depositing a film, the method comprising:
providing a substrate comprising a first substrate surface including a metal oxide and a second substrate surface including a hydroxyl-terminated dielectric surface; exposing the substrate to an alcohol to reduce the metal oxide to a first metal and esterify the hydroxyl-terminated surface to form an alkoxy-terminated dielectric surface; exposing the substrate to one or more deposition gases to deposit a second metal film on the first metal selectively over the alkoxy-terminated dielectric surface; and hydroxylating the alkoxy-terminated dielectric surface to form a hydroxyl-terminated dielectric.