发明名称 |
LOCAL DOPING OF TWO-DIMENSIONAL MATERIALS |
摘要 |
This disclosure provides systems, methods, and apparatus related to locally doping two-dimensional (2D) materials. In one aspect, an assembly including a substrate, a first insulator disposed on the substrate, a second insulator disposed on the first insulator, and a 2D material disposed on the second insulator is formed. A first voltage is applied between the 2D material and the substrate. With the first voltage applied between the 2D material and the substrate, a second voltage is applied between the 2D material and a probe positioned proximate the 2D material. The second voltage between the 2D material and the probe is removed. The first voltage between the 2D material and the substrate is removed. A portion of the 2D material proximate the probe when the second voltage was applied has a different electron density compared to a remainder of the 2D material. |
申请公布号 |
US2016064249(A1) |
申请公布日期 |
2016.03.03 |
申请号 |
US201514833407 |
申请日期 |
2015.08.24 |
申请人 |
Wong Dillon;Velasco, JR. Jairo;Ju Long;Kahn Salman;Lee Juwon;Germany Chad E.;Zettl Alexander K.;Wang Feng;Crommie Michael F. |
发明人 |
Wong Dillon;Velasco, JR. Jairo;Ju Long;Kahn Salman;Lee Juwon;Germany Chad E.;Zettl Alexander K.;Wang Feng;Crommie Michael F. |
分类号 |
H01L21/326;H01L21/479;H01L21/02 |
主分类号 |
H01L21/326 |
代理机构 |
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代理人 |
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主权项 |
1. A method comprising:
(a) forming an assembly including a substrate, a first insulator disposed on the substrate, a second insulator disposed on the first insulator, and a two-dimensional (2D) material disposed on the second insulator; (b) applying a first voltage between the 2D material and the substrate; (c) with the first voltage applied between the 2D material and the substrate, applying a second voltage between the 2D material and a probe positioned proximate the 2D material; (d) removing the second voltage between the 2D material and the probe; and (e) removing the first voltage between the 2D material and the substrate, a portion of the 2D material proximate the probe in operation (c) having a different electron density compared to a remainder of the 2D material. |
地址 |
Alameda CA US |