| 发明名称 |
MAGNETIC ANNEALING APPARATUS |
| 摘要 |
Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder. |
| 申请公布号 |
US2016061526(A1) |
申请公布日期 |
2016.03.03 |
| 申请号 |
US201514840486 |
申请日期 |
2015.08.31 |
| 申请人 |
Tokyo Electron Limited |
发明人 |
Yamazaki Mitsuru;Clarke Barry;Colgan Ian;Eyres George;Domsa Ioan |
| 分类号 |
F27B17/00;H01L43/12;F27D7/06;F27D99/00;F27D5/00 |
主分类号 |
F27B17/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A magnetic annealing apparatus comprising:
a processing container having a horizontally-elongated tubular shape, and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder. |
| 地址 |
Tokyo JP |
