| 发明名称 |
CHARGED PARTICLE BEAM DEVICE EQUIPPED WITH STAGE DEVICE CAPABLE OF MEASURING WEIGHT |
| 摘要 |
This charged particle beam device has weight measurement means (28) for measuring the weight of a sample. Measuring the weight of the sample allows a safe and highly precise positioning to be achieved, even if the load from a sample varies. |
| 申请公布号 |
WO2016031508(A1) |
申请公布日期 |
2016.03.03 |
| 申请号 |
WO2015JP72156 |
申请日期 |
2015.08.05 |
| 申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
MOMOI YASUYUKI;MAKI NOBUYUKI;INOUE TOMOHIRO;SUZUKI HIROYUKI |
| 分类号 |
H01J37/20;H01J37/28;H01L21/66 |
主分类号 |
H01J37/20 |
| 代理机构 |
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代理人 |
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