发明名称 ETCHING MASK, MANUFACTURING METHOD THEREFOR, POROUS MEMBRANE MANUFACTURING METHOD USING ETCHING MASK, POROUS MEMBRANE, FINE DUST-BLOCKING MASK INCLUDING POROUS MEMBRANE, AND MANUFACTURING METHOD FOR SURFACE ENHANCED RAMAN SCATTERING ACTIVE SUBSTRATE
摘要 According to the present invention, in an etching mask, a manufacturing method therefor, a porous membrane manufacturing method, the porous membrane, a fine dust-blocking mask, and a surface enhanced Raman scattering active substrate manufacturing method, the etching mask comprises: an organic film; and a pattern layer arranged on the organic film and having openings formed in the shape of a micro hole or a nano hole and having a uniform size.
申请公布号 WO2016032270(A1) 申请公布日期 2016.03.03
申请号 WO2015KR09033 申请日期 2015.08.28
申请人 PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERRATION FOUNDATION 发明人 YANG, SEUNG YUN;LEE, SEUNGHYUN
分类号 B01D69/00;B01D67/00;B01J19/00;C08J9/00 主分类号 B01D69/00
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