发明名称 |
ETCHING MASK, MANUFACTURING METHOD THEREFOR, POROUS MEMBRANE MANUFACTURING METHOD USING ETCHING MASK, POROUS MEMBRANE, FINE DUST-BLOCKING MASK INCLUDING POROUS MEMBRANE, AND MANUFACTURING METHOD FOR SURFACE ENHANCED RAMAN SCATTERING ACTIVE SUBSTRATE |
摘要 |
According to the present invention, in an etching mask, a manufacturing method therefor, a porous membrane manufacturing method, the porous membrane, a fine dust-blocking mask, and a surface enhanced Raman scattering active substrate manufacturing method, the etching mask comprises: an organic film; and a pattern layer arranged on the organic film and having openings formed in the shape of a micro hole or a nano hole and having a uniform size. |
申请公布号 |
WO2016032270(A1) |
申请公布日期 |
2016.03.03 |
申请号 |
WO2015KR09033 |
申请日期 |
2015.08.28 |
申请人 |
PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERRATION FOUNDATION |
发明人 |
YANG, SEUNG YUN;LEE, SEUNGHYUN |
分类号 |
B01D69/00;B01D67/00;B01J19/00;C08J9/00 |
主分类号 |
B01D69/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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