| 摘要 |
A particle beam processing device is specified, having a rotor (10) which is rotatable around an axis of rotation (R) and having an upper face (12), a first chamber (18) and a second chamber (20). A cover (22) lies opposite the upper face (12) of the rotor (10) and has a first working opening (24) and a second working opening (26). The first working opening (24) is surrounded by a sealing device (40). By rotating the rotor (10) to a position where a first chamber opening (14) or a second chamber opening (16) coincides with the first working opening (24), the sealing means (40) is brought into a sealing engagement with a seal (28, 30) provided around the corresponding chamber opening (14, 16), while the other chamber opening is not sealed with respect to the cover (22). |
