APPARATUS AND METHODS FOR PERFORMING LASER ABLATION ON A SUBSTRATE

摘要

Apparatus and methods are disclosed for performing laser ablation. In an example arrangement a spatial light modulator (54) is used to modulate a pulsed laser beam from a solid state laser (52). A two- stage de-magnification process (58, 62) is used to allow radiation intensity to be kept relatively low at the spatial light modulator (54) while allowing access to feedback sensors (64) in an intermediate imaging plane.