Array Mode Repeater Detection

摘要

Systems and methods for detecting defects on a wafer are provided. One method includes generating test image(s) for at least a portion of an array region in die(s) on a wafer from frame image(s) generated by scanning the wafer with an inspection system. The method also includes generating a reference image for cell(s) in the array region from frame images generated by the scanning of the wafer. In addition, the method includes determining difference image(s) for at least one cell in the at least the portion of the array region in the die(s) by subtracting the reference image from portion(s) of the test image(s) corresponding to the at least one cell. The method further includes detecting defects on the wafer in the at least one cell based on the difference image(s).

主权项

1. A computer-implemented method for detecting defects on a wafer, comprising:
generating one or more test images for at least a portion of an array region in one or more dies on a wafer from one or more frame images generated by scanning the wafer with an inspection system; generating a reference image for one or more cells in the array region from two or more of the frame images generated by said scanning the wafer with the inspection system; determining one or more difference images for at least one cell in at least the portion of the array region in the one or more dies by subtracting the reference image from one or more portions of the one or more test images corresponding to the at least one cell; and detecting defects on the wafer in the at least one cell based on the one or more difference images determined for the at least one cell, wherein said generating the one or more test images, generating the reference image, determining the one or more difference images, and detecting the defects are performed with a computer system.