发明名称 DOPING METHOD AND LAYERED BODY FOR DOPING
摘要 Provided is a doping method with which it is possible to omit a step for coating a coating-type diffusion agent onto a base material, and a layered body for doping for use with the doping method. This doping method includes: layering, onto a semiconductor layer or a base material, a layered body for doping (100) having a transparent base material (10) and a light-absorbent dopant film (20) layered on the transparent base material, the layering being carried out such that the light-absorbent dopant film (10) faces the semiconductor layer or a base material (30); and doping the semiconductor layer or the base material (30) with a dopant by irradiating light (50) onto the light-absorbent dopant film (20) through the transparent base material (10), the dopant being derived from the light-absorbent dopant film (20). This layered body for doping (100) has the transparent base material (10) and the light-absorbent dopant film (20) layered on the transparent base material.
申请公布号 WO2016031826(A1) 申请公布日期 2016.03.03
申请号 WO2015JP73893 申请日期 2015.08.25
申请人 TEIJIN LIMITED 发明人 IMAMURA, TETSUYA;TOMIZAWA, YUKA;IKEDA, YOSHINORI
分类号 H01L21/225;H01L21/22;H01L31/068;H01L31/18 主分类号 H01L21/225
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