| 发明名称 |
METHOD FOR FORMING COLOR FILTER ARRAY, METHOD FOR MANUFACTURING IMAGING APPARATUS, AND IMAGING APPARATUS |
| 摘要 |
A method for forming a color filter array includes a step of exposing a photosensitive color filter film, a step of forming a color filter array from the color filter film by developing the color filter film using a developer, and a step of cleaning the color filter array while rotating the color filter array and moving a nozzle for spraying fluid containing liquid and gas above the color filter array in a direction intersecting with an axis of the rotation. The method reduces variation in thickness of a color filter that is generated in the cleaning step. |
| 申请公布号 |
US2016065916(A1) |
申请公布日期 |
2016.03.03 |
| 申请号 |
US201514838145 |
申请日期 |
2015.08.27 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Ishioka Masao;Shimoyama Daisuke;Sumida Takayuki;Aoki Kei;Kawabata Yasuhiro;Inatani Naoki;Tezuka Tomoyuki;Iwata Jun;Kurihara Masaki |
| 分类号 |
H04N9/04;G03F7/00;H04N5/225;G03F7/32;G03F7/40;G02B5/20;G03F7/20 |
主分类号 |
H04N9/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for forming a color filter array, the method comprising:
a step of exposing a photosensitive color filter film; a step of forming a color filter array from the color filter film by developing the color filter film using a developer; and a step of cleaning the color filter array with fluid containing liquid and gas, while rotating the color filter array and moving a nozzle for spraying the fluid above the color filter array in a direction intersecting with an axis of the rotation, wherein the cleaning step is performed so that an amplitude of a change in thicknesses of respective color filters of the color filter array, the respective color filters corresponding to a plurality of pixels, becomes 2.0% or less of an average value of the thicknesses of the respective color filters after the cleaning step. |
| 地址 |
Tokyo JP |
