LASER-DRIVEN PHOTON SOURCE AND INSPECTION APPARATUS INCLUDING SUCH A LASER-DRIVEN PHOTON SOURCE

摘要

Disclosed is a laser-driven photon source comprising drive optics which focus drive radiation so as to maintain a plasma. The point spread function of the drive optics has a point spread function (75) which is configured such that a spectral position of a peak output wavelength of a black body portion of output radiation emitted by said plasma within a desired wavelength band.