发明名称 SUBSTRATE CONTAINER
摘要 A front opening wafer container with a forward and rearward sets of stacked V- shaped wafer edge receiving portions, the rearward set part of a wafer shelf component and comprising a thin film of PBT preformed and overmolded with a polycarbonate. The sets of stacked V-shaped wafer edge receiving portions providing between-shelf seating positions above on-shelf seating positions. The PBT providing a low friction sliding engagement surface for the wafer edges thereby providing uniform and consistent dropping of wafers from the between shelf position to the on-shelf positon when the door of the wafer container is removed.
申请公布号 WO2016033503(A1) 申请公布日期 2016.03.03
申请号 WO2015US47498 申请日期 2015.08.28
申请人 ENTEGRIS, INC. 发明人 GREGERSON, BARRY;ANDERSEN, CHRISTIAN;RASCHKE, RUSS, V.;ZABKA, MICHAEL
分类号 H01L21/673 主分类号 H01L21/673
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