A front opening wafer container with a forward and rearward sets of stacked V- shaped wafer edge receiving portions, the rearward set part of a wafer shelf component and comprising a thin film of PBT preformed and overmolded with a polycarbonate. The sets of stacked V-shaped wafer edge receiving portions providing between-shelf seating positions above on-shelf seating positions. The PBT providing a low friction sliding engagement surface for the wafer edges thereby providing uniform and consistent dropping of wafers from the between shelf position to the on-shelf positon when the door of the wafer container is removed.
申请公布号
WO2016033503(A1)
申请公布日期
2016.03.03
申请号
WO2015US47498
申请日期
2015.08.28
申请人
ENTEGRIS, INC.
发明人
GREGERSON, BARRY;ANDERSEN, CHRISTIAN;RASCHKE, RUSS, V.;ZABKA, MICHAEL