WAFER MANUFACTURING APPARATUS AND METHOD

摘要

An embodiment provides a wafer manufacturing apparatus comprising: a chamber; a susceptor arranged within the chamber, on which a wafer is seated; a shaft arranged below the susceptor and comprising a body formed in a column form and a plurality of arms supporting the susceptor; and lamps installed at an upper portion of the susceptor and a lower portion of the shaft to heat the wafer, wherein each of the arms includes a first part extending from the body and a second part bent and extending from the first part, and a pre-set angle is formed by the first part and the second part.