BREAKING APPARATUS FOR SUBSTRATE

摘要

The present invention provides a substrate breaking apparatus. The substrate breaking apparatus comprises: an air bearing table supporting a substrate by injecting an air from a plurality of air supply holes formed on an upper surface; and a break unit provided in a position facing the air bearing table to apply a force to the substrate positioned between the break unit and the air bearing table to break the substrate. The substrate breaking apparatus more effectively transmits an impact load to the substrate in order to be easily cut the substrate.