发明名称 THIN FILM ELECTRONIC COMPONENT
摘要 A thin film electronic component includes: a substrate; a thin film electrode layer over the substrate; an inorganic insulation layer formed on the thin film electrode layer; an organic insulation layer formed on the inorganic insulation layer; and a lead-out electrode that electrically connects to the thin film electrode layer. The inorganic insulation layer has a through-hole formed therein, so as to expose a portion of the thin film electrode layer. The organic insulation layer has a through-hole formed therein, so as to expose the through-hole in the inorganic insulation layer. The lead-out electrode is formed in the through-hole in the inorganic insulation layer and the through-hole in the organic insulation layer. A shape of a borderline defining the through-hole at a top surface of the organic insulation layer in a plan view has chamfered corners.
申请公布号 US2016064473(A1) 申请公布日期 2016.03.03
申请号 US201514835360 申请日期 2015.08.25
申请人 TAIYO YUDEN CO., LTD. 发明人 MORITO Kentaro;ISHII Daiki
分类号 H01L49/02;H01L23/48 主分类号 H01L49/02
代理机构 代理人
主权项 1. A thin film electronic component, comprising: a substrate; a thin film electrode layer over the substrate; an inorganic insulation layer formed on said thin film electrode layer; an organic insulation layer formed on said inorganic insulation layer; and a lead-out electrode that electrically connects to the thin film electrode layer, wherein the inorganic insulation layer has a through-hole formed therein, so as to expose a portion of the thin film electrode layer, wherein the organic insulation layer has a through-hole formed therein, so as to expose the through-hole in the inorganic insulation layer, wherein said lead-out electrode is formed in the through-hole in the inorganic insulation layer and the through-hole in the organic insulation layer, and wherein a shape of a borderline defining the through-hole at a top surface of the organic insulation layer in a plan view has chamfered corners.
地址 Tokyo JP