| 摘要 |
The present invention relates to a tray assembly and a thin film deposition apparatus having the same. The tray assembly according to the present invention comprises a tray having a substrate mounted, and formed to be moved a certain distance in parallel to the surface where the substrate is mounted; and a magnet plate formed on the lower part of the tray, and moved by being connected to the tray to pull a mask sheet, and formed to be moved a certain distance in perpendicular to the surface where the substrate is mounted. The purpose of the present invention is to provide the tray assembly enabling vision alignment. |
