| 摘要 |
The present invention relates to a linear evaporator capable of precisely measuring an evaporation speed of a deposited material evaporated from a crucible, and organic matter deposition equipment using the same. The linear evaporator according to the present invention comprises: a crucible containing a deposited material to be deposited on a substrate, and evaporating the deposited material; a heater heating the crucible to evaporate the deposited material contained in the crucible; a distributor located on an upper side of the crucible, and formed in a housing shape lengthwise in an X-axis direction parallel to a surface of the substrate to allow the deposited material evaporated from the crucible to evenly fly to the substrate; multiple evaporation nozzles provided on an upper side of the distributor as an exit through which the deposited material is discharged; a rate nozzle for allowing the deposited materials to be discharged in a Y-axis direction which is in a vertical direction around the X axis of the distributor and is parallel to the surface of the substrate; and a rate sensor for sensing an amount of the deposited material discharged from the rate nozzle. Therefore, disclosed is a technology capable of precisely controlling each crucible, and precisely realizing a target thickness of deposition, thereby reducing a defect rate and enhancing productivity. |
