SOLID-STATE IMAGE SENSOR AND CAMERA

摘要

A solid-state image sensor is provided. The sensor includes a semiconductor region having a first conductivity type, and a charge accumulation portion having a second conductivity type. The semiconductor region includes a first semiconductor region, and a second semiconductor region formed below the first semiconductor region and having an impurity concentration higher than that of the first semiconductor region. The charge accumulation portion has a side and a bottom covered with the semiconductor region, and includes at least three regions arranged along a depth direction. A first region formed in a shallowest position has a width larger than that of each of the at least three regions. An impurity concentration of a second region formed in a deepest position is higher than that of each region between the first and second region of the at least three regions.

主权项

1. A solid-state image sensor comprising:
a substrate including a semiconductor region having a first conductivity type, and a charge accumulation portion having a second conductivity type opposite to the first conductivity type and configured to accumulate an electric charge generated by photoelectric conversion, wherein the semiconductor region includes a first semiconductor region, and a second semiconductor region formed below the first semiconductor region and having an impurity concentration higher than that of the first semiconductor region, the charge accumulation portion has a side and a bottom covered with the semiconductor region, and includes at least three regions arranged along a depth direction of the substrate, a first region formed in a shallowest position of the at least three regions has a width larger than that of each of the at least three regions except for the first region, in a direction parallel to a surface of the substrate, and an impurity concentration of a second region formed in a deepest position of the at least three regions is higher than that of each region between the first region and the second region of the at least three regions.