SPHERICAL CRYSTALLINE SILICA PARTICLES AND METHOD FOR PRODUCING SAME

摘要

Provided are: spherical crystalline silica particles having higher productivity than in the prior art, lower production costs, a high thermal expansion coefficient, high thermal conductivity, high fluidity, high dispersibility, excellent filling properties, low abrasiveness, and high purity, the spherical crystalline silica particles being usable even in the field of semiconductors; and a method for producing the same. Spherical crystalline silica particles characterized by including 400-5,000 ppm of aluminum and including 80% or more crystalline phase.