| 发明名称 |
TEST KEY ARRAY |
| 摘要 |
The present invention provides a test key array including a lower conductive pattern, and the lower conductive pattern includes a plurality of first L-shaped traces parallel to each other, an upper conductive pattern, where the upper conductive pattern includes a plurality of second L-shaped traces parallel to each other, the lower conductive pattern crosses to the upper conductive pattern, and a plurality of cross regions are defined between the lower conductive pattern and the upper conductive pattern, and a plurality of conductive plugs, disposed on parts of the cross regions, electrically connecting to the lower conductive pattern and the upper conductive pattern. |
| 申请公布号 |
US2016064295(A1) |
申请公布日期 |
2016.03.03 |
| 申请号 |
US201414472348 |
申请日期 |
2014.08.28 |
| 申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
Chao Tse-Min;Chang Tzu-Yun;Hsiao Hsueh-Chun |
| 分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A test key array, comprising:
a lower conductive pattern, wherein the lower conductive pattern includes a plurality of first L-shaped traces parallel to each other; an upper conductive pattern, wherein the upper conductive pattern includes a plurality of second L-shaped traces parallel to each other, wherein, the lower conductive pattern crosses to the upper conductive pattern, and a plurality of cross regions are defined between the lower conductive pattern and the upper conductive pattern; and a plurality of conductive plugs, disposed on parts of the cross regions, electrically connecting to the lower conductive pattern and the upper conductive pattern. |
| 地址 |
Hsin-Chu City TW |
