A PRETREATMENT APPARATUS FOR SPECIMEN IN SCANNING ELCTRON MICROSCOPE

摘要

The present invention relates to an automated pretreatment apparatus for shooting a specimen by a scanning electron microscope, which especially comprises: a pretreatment solution supply module for supplying a pretreatment solution for the subject specimen; a pipe module for conveying the pretreatment solution supplied by the pretreatment solution supply module; a specimen pretreatment module for treating by allocating the pretreatment solution supplied by the pipe module to the subject specimen; and, a control module for controlling a process comprising a supply time, supply quantity, and treatment order of the pretreatment solution.