DOSING DEVICE BASED ON PIEZO ACTUATOR AND METHOD FOR OPERATING THE SAME

摘要

A dosing device based on a piezo actuator is disclosed. The dosing device based on a piezo actuator comprises: a process solution storage unit storing a process solution; a cleaning storage unit storing a cleaning solution; a solution supply unit connected to the process solution storage unit and the cleaning storage unit to supply the process solution or the cleaning solution to a nozzle unit; the nozzle unit configured to spray the solution, supplied from the solution supply unit, to the outside through a spray hole; a tappet coupled to be vertically movable so as to open or close the spray hole; and a piezo actuator configured to vertically drive the tappet in accordance with a control signal. Therefore, the dosing device easily washes the nozzle unit.