发明名称 電界効果型トランジスタ
摘要 There is provided a field effect transistor which comprises a gate insulating layer, a gate electrode, a semiconductor layer, a source electrode and a drain electrode. The gate insulating layer contains an organic compound that contains a silicon-carbon bond and a metal compound that contains a bond between a metal atom and an oxygen atom; and the metal atoms are contained in the gate insulating layer in an amount of 10 to 180 parts by weight with respect to 100 parts by weight of the total of carbon atoms and silicon atoms. This field effect transistor (FET) has high mobility and a low voltage of the threshold value, while being suppressed in leak current.
申请公布号 JP5874819(B2) 申请公布日期 2016.03.02
申请号 JP20140513392 申请日期 2014.03.11
申请人 東レ株式会社 发明人 村瀬 清一郎;山本 真衣子;真多 淳二;清水 浩二
分类号 H01L29/786;H01L21/28;H01L21/312;H01L21/336;H01L51/05;H01L51/30;H01L51/40 主分类号 H01L29/786
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