发明名称 半導体素子の接合方法および接合構造
摘要 [Problem] The present invention provides a method for bonding semiconductor elements while assuring excellent electric conductivity and transparency at an interface, and a junction structure according to the bonding method. The present invention also provides a method for bonding semiconductor elements wherein excellent electric conductivity is assured at an interface and optical characteristics favorable for element characteristics can be designed, and a junction structure according to the bonding method. [Solution] Electrically conductive nano particles which are not covered with organic molecules are arrayed on a surface of one semiconductor element without causing optical loss, and another semiconductor element is pressure-bonded thereagainst.
申请公布号 JP5875124(B2) 申请公布日期 2016.03.02
申请号 JP20130539671 申请日期 2012.10.17
申请人 国立研究開発法人産業技術総合研究所 发明人 水野 英範;牧田 紀久夫
分类号 H01L25/065;B22F1/00;H01L25/07;H01L25/18;H01L31/0687;H01L31/0725;H01L31/078 主分类号 H01L25/065
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