发明名称 |
ARC EVAPORATION COATING SOURCE HAVING A PERMANENT MAGNET |
摘要 |
An arc evaporation coating source includes a target made of a coating material to be vapor-deposited, a ferromagnetic yoke for influencing the vapor deposition of the coating material to be vapor-deposited and at least one permanent-magnetic body for influencing the vapor deposition of the coating material to be vapor-deposited. The ferromagnetic yoke is disposed in contact with the target. The permanent-magnetic body is fastened to the target by the ferromagnetic yoke. |
申请公布号 |
EP2989654(A1) |
申请公布日期 |
2016.03.02 |
申请号 |
EP20140731536 |
申请日期 |
2014.04.17 |
申请人 |
PLANSEE SE |
发明人 |
PERL, MATTHIAS;POLCIK, PETER;POLZER, CONRAD;SCHLICHTHERLE, STEFAN;STRAUSS, GEORG |
分类号 |
H01J37/32;C23C14/32 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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