| 摘要 |
The present invention addresses the problem of providing a monocrystalline substrate production method capable of easily producing a relatively large and thin monocrystalline substrate, and a monocrystalline member with a modified layer formed therein. This method comprises: a step for arranging a laser condensing means upon a monocrystalline member in a non-contact state; a step for irradiating, with a laser beam, a surface (10t) of the monocrystalline member by means of the laser condensing means, and condensing the laser beam on the interior of the monocrystalline member; a step for moving the laser condensing means and monocrystalline member relative to each other, and forming a two-dimensional modified layer (12), created by a polycrystalline part parallel with the irradiating axis of the laser beam in the interior of the monocrystalline member; and a step for forming a monocrystalline substrate (10s) by detaching, from the interface with the modified layer (12), a monocrystalline layer (10u) formed as a result of segmentation by the modified layer (12). |
