发明名称 FINFET TRANSISTOR WITH U-SHAPED CHANNEL
摘要 A semiconductor device having a u-shaped fin-like field effect transistor (FinFET) and methods for forming the same are disclosed. The semiconductor device includes a substrate and a fin over the substrate, wherein the fin has a u-shape from a top view with first and second arm portions and a bridge portion connecting the first and second arm portions. The semiconductor device further includes a first gate over the substrate, engaging the fin at both the first and second arm portions and the bridge portion. A source region of the FinFET is formed in the first arm portion, a drain region of the FinFET is formed in the second arm portion, and a channel region of the FinFET is formed in the fin between the source region and the drain region.
申请公布号 KR20160022753(A) 申请公布日期 2016.03.02
申请号 KR20140193936 申请日期 2014.12.30
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 WEN TSUNG YAO;WANG MAO NAN;YEONG SAI HOOI
分类号 H01L29/78 主分类号 H01L29/78
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