| 发明名称 |
PROCESS AND APPARATUS FOR PREPARATION OF POLYSILANES |
| 摘要 |
The invention relates to a process for preparing polysilanes by converting monosilane in the presence of hydrogen in a plasma, and to a plant for performing the process. |
| 申请公布号 |
EP2988859(A1) |
申请公布日期 |
2016.03.02 |
| 申请号 |
EP20140707389 |
申请日期 |
2014.02.28 |
| 申请人 |
EVONIK DEGUSSA GMBH |
发明人 |
LANG, JÜRGEN ERWIN;RAULEDER, HARTWIG;MÜH, EKKEHARD |
| 分类号 |
B01J12/00;C01B33/04;C07F7/02 |
主分类号 |
B01J12/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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