发明名称 SUBSTRATE HAVING RUGGED STRUCTURE OBTAINED FROM HYDROPHOBIC SOL/GEL MATERIAL
摘要 There are provided a substrate having a fine concave-convex structure which is hydrophobic and excellent in heat resistance, a solution used for producing the substrate, and a method for producing the substrate. The substrate having the concave-convex structure includes a concave-convex structure layer made of a sol-gel material, and a contact angle of water on the sol-gel material in a flat and smooth film shape is not less than 80°. The substrate has the concave-convex structure layer made of the sol-gel material, thus the substrate is excellent in heat resistance and corrosion resistance and is also resistant to the process for manufacturing an element in which the substrate is incorporated. Further, the substrate having the concave-convex structure according to the present invention has a hydrophobic surface, and thus, in the element in which this substrate is incorporated, moisture adsorption onto the surface of the substrate can be prevented, thereby making it possible to lengthen a service life of the element.
申请公布号 EP2990197(A1) 申请公布日期 2016.03.02
申请号 EP20140787727 申请日期 2014.04.09
申请人 JX NIPPON OIL & ENERGY CORPORATION 发明人 NAKAYAMA, KEISUKE;TAKAHASHI, MADOKA;SEKI, TAKASHI
分类号 H01L51/50;B32B9/00;H01L21/027;H05B33/02;H05B33/04;H05B33/10;H05B33/28 主分类号 H01L51/50
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