FILM FORMATION DEVICE

摘要

The present invention is to provide a technology for forming an organic compound film having a uniform thickness on a film at a high film formation speed while transporting the film in a vacuum chamber. In a vacuum chamber 2, a film 10 reeled out from a mother roll 41 is transported in contact with a center roller 3 and an organic compound film is formed on the film 10. A vapor emission device 8 disposed in a film deposition chamber 6 provided in the vacuum chamber 2 and having a vapor emission unit 82 which emits and blows a vapor of an organic compound monomer to a film 10 on the center roller 3; and an energy ray-emitting device 9 for irradiating an organic compound monomer layer formed on the center roller 3 with an energy ray so as to cure the organic compound layer are provided. The vapor emission device 8 and the film deposition chamber 6 are respectively connected to fifth and third vacuum evacuation devices 80 and 60 which are independently controllable; and the pressure in the vapor emission device 8 is set to be larger than the pressure in the film deposition chamber 6. The difference between the pressure in the vapor emission device 8 and the pressure in the film deposition chamber 6 is set to be constant.