发明名称 弾性波装置およびその製造方法
摘要 An elastic wave device includes a piezoelectric substrate, a comb-shaped electrode above an upper surface of the piezoelectric substrate, a wiring connected to the comb-shaped electrode, an element cover above the upper surface of the piezoelectric substrate for covering the comb-shaped electrode across a space, a first electrode above an upper surface of the element cover, a sealing resin above the upper surface of the piezoelectric substrate for covering the element cover and the first electrode, a terminal electrode above an upper surface of the sealing resin, and a second electrode passing through the sealing resin for electrically connecting the first electrode with the terminal electrode. The first and second electrodes are made of films produced by electro-plating. The diameter of plating particles of the first electrode may be larger than that of plating particles of the second electrode.
申请公布号 JP5877233(B2) 申请公布日期 2016.03.02
申请号 JP20140204251 申请日期 2014.10.02
申请人 スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 发明人 藤田 知宏;松島 賢一
分类号 H03H9/145;H01L23/04;H03H3/08 主分类号 H03H9/145
代理机构 代理人
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