Micromechanical devices based on piezoelectric resonators

摘要

In some embodiments, a micromechanical filter includes multiple subfilters, each subfilter comprising multiple piezoelectric resonators mechanically coupled in series, wherein the subfilters are mechanically coupled to each other in parallel.

主权项

1. A micromechanical filter comprising:
multiple subfilters, including a first subfilter comprising first and second piezoelectric resonators mechanically coupled in series by a narrow coupling beam and a second subfilter comprising first and second piezoelectric resonators mechanically coupled in series by a narrow coupling beam; a first narrow cross-coupling beam mechanically coupling the first piezoelectric resonator of the first subfilter to the first piezoelectric resonator of the second subfilter; and a second narrow cross-coupling beam mechanically coupling the second piezoelectric resonator of the first subfilter to the second piezoelectric resonator of the second subfilter; wherein the cross-coupling beams mechanically couple the first and second subfilters in parallel.