| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide manufacturing methods of an optical waveguide with which elements can be mounted in a portion where an optical waveguide is not formed, on a substrate, a manufacturing method of a photo-electric composite substrate, and an optical waveguide and a photo-electric composite substrate manufactured by such manufacturing methods. <P>SOLUTION: A manufacturing method of an optical waveguide 5 is provided with which the optical waveguide 5 having a lower clad pattern 201 and a core pattern 301 is laminated and formed in a part of a surface of a substrate 1. The method includes, in order, first steps ((c) to (d)) of forming a lower clad layer 2 by laminating a lower clad layer forming resin on an upper face of the substrate and then forming the lower clad pattern 201 by patterning the lower clad layer so as to expose a part of the surface of the substrate, and second steps ((e) to (f)) of forming a core layer 3 by laminating a core layer forming resin on the lower clad pattern and on the substrate 1 and then forming the core pattern 301 only on the lower clad pattern by patterning the core layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
