发明名称 試験ガラス交換
摘要 A test glass changer for optically measuring layer properties in a vacuum coating system including a movable substrate holder for guiding a substrate through a stream of coating material; a mount connected to a rotary spindle and rotatable relative to the substrate holder about the rotary spindle; and a control device directing a test glass element into a ray path of an optical measuring device and into a stream of the coating material. The mount has at least two recesses offset eccentrically with respect to the spindle for one test glass element in each case. The control device can induce a rotational movement of the mount about the spindle. The centering device can exert a torque and holding moment on the mount to bring a test glass element arranged in one of the recesses into a measuring position of the measuring device. Related methods are also provided.
申请公布号 JP5872044(B2) 申请公布日期 2016.03.01
申请号 JP20140527507 申请日期 2012.06.28
申请人 ビューラー アルツェナウ ゲゼルシャフト ミット ベシュレンクテル ハフツングBuehler Alzenau GmbH 发明人 アルフォンス ツェラー;ハロ ハーゲドアン;エックハート ヴィアト;ヴェアナー ヴァインリヒ;トビアス グロース
分类号 G01N21/01;C23C14/54 主分类号 G01N21/01
代理机构 代理人
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