Recycling unit and substrate treating apparatus

摘要

The substrate treating apparatus includes a drying chamber in which an organic solvent remaining on a substrate is dissolved by using a fluid, and a recycling unit including a separator for separating the organic solvent from the fluid discharged from the drying chamber to recycle the fluid. The separator includes a distiller in which a fluid containing an organic solvent having a first concentration is introduced, a heating unit heating a fluid containing an organic solvent having a second concentration discharged from the distiller, and supplying an evaporated fluid containing an organic solvent having a third concentration into the distiller, and a condensation unit liquefying a fluid containing an organic solvent having a fourth concentration discharged from the distiller. The organic solvent has the second concentration, the first concentration, the third concentration, and the fourth concentration which are successively lowered in concentration.

主权项

1. A substrate treating apparatus comprising:
a drying chamber in which an organic solvent remaining on a substrate is dissolved by using a fluid that is provided as a supercritical fluid to dry the substrate; a supply unit supplying the fluid into the drying chamber; and a recycling unit comprising a separator for separating the organic solvent from the fluid discharged from the drying chamber to recycle the fluid, the recycling unit supplying the recycled fluid into the supply unit, wherein the separator comprises: a distiller in which a fluid containing an organic solvent having a first concentration is flowed in; a heating unit heating a fluid containing an organic solvent having a second concentration discharged from the distiller, the heating unit supplying an evaporated fluid containing an organic solvent having a third concentration into the distiller; and a condensation unit liquefying a fluid containing an organic solvent having a fourth concentration discharged from the distiller, wherein the organic solvent has the second concentration, the first concentration, the third concentration, and the fourth concentration which are successively lowered in concentration.