Systems for aligning an optical element and method for same

摘要

A hexapod system is provided for aligning an optical element in semiconductor clean rooms or in a vacuum, particularly in an illumination device for a microlithographic EUV projection exposure apparatus. The system includes six hexapod supporting structures. Using a set of at least two replaceable spacer elements having a different extent in at least one direction, at least one of the six supporting structures can be adjusted. The latter is adapted so that a spacer element can be removed or a spacer element can be added while the coupling of the first coupling end to the carrying structure and the coupling of the second coupling end to the optical element are maintained. A method for aligning an optical element in semiconductor clean rooms or in a vacuum including using a hexapod system is provided.

主权项

1. A hexapod system, comprising:
six hexapod supporting structures, wherein:
each hexapod supporting structure is couplable at a first coupling end to a carrying structure and at a second coupling end to an optical element;each hexapod supporting structure has a working length corresponding to a distance between the carrying structure and the optical element along a principal axis established by the supporting structure;for at least one of the hexapod supporting structures, the hexapod supporting structure is configured so that, while maintaining both the coupling of the first coupling end of the at least one hexapod supporting structure to the carrying structure and the coupling of the second coupling end of the at least one hexapod supporting structure to the optical element, a spacer element is removable from the supporting structure or a spacer element is addable to the supporting structure.