发明名称 観察撮影装置
摘要 Disclosed is an observation and photography apparatus to which a polishing mechanism (20) is attached. The polishing mechanism (20) is provided with: a turntable (24) with a perpendicular rotation shaft (23); a polishing cloth (26, 27) for polishing the surface of a sample (15) attached to the bottom surface of the turntable (24), and a polishing-fluid spraying nozzle (31, 33) disposed below the polishing cloth (26, 27) for spraying polishing fluid containing polishing material upward to we the polishing cloth (26, 27).
申请公布号 JP5874074(B2) 申请公布日期 2016.03.01
申请号 JP20140521474 申请日期 2013.06.18
申请人 国立大学法人 鹿児島大学;株式会社中山電機 发明人 足立 吉隆;中山 誠
分类号 B24B37/00;B24B37/34;B24B49/12;C25F7/00 主分类号 B24B37/00
代理机构 代理人
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