Siloxane polymer compositions

摘要

A siloxane composition and a method of producing the same. The composition comprises a siloxane prepolymer with a backbone exhibiting a group which is capable of being deprotonated in an aqueous base solution. Further, there are reactive functional groups, which are capable of reacting during thermal or radiation initiated curing. The siloxane is cross-linked during condensation polymerization to increase molecular weight thereof.;The composition can be used in high-resolution negative tone lithographic fabrication processes where a water based developer system is applied in the development step of the lithography process.

主权项

1. A method of producing a siloxane prepolymer composition capable of forming a film that is completely soluble in an alkaline-aqueous solution and comprising a siloxane prepolymer with a siloxane backbone exhibiting a group which is capable of being deprotonated in an aqueous base solution and further exhibiting two different reactive functional groups, one of which is an active group having a double bond, said siloxane prepolymer having been cross-linked through the active groups by adding a radical initiator during polymerisation to increase the molecular weight thereof, wherein between 25 mol % and 75 mol % of the active groups are crosslinked, a solvent for the siloxane prepolymer, and a photo reactive compound, the method comprising:
hydrolysing at least two different silane monomers, one of which silane monomers has a methacrylate group and the other of which has an active functional group different from methacrylate, condensating the silane monomers to form a siloxane prepolymer having a molecular weight of about 2,000 to 20,000 g/mol, partially cross-linking the siloxane prepolymer through the methacrylate groups using a radical initiator, and incorporating a photo reactive compound and a solvent for the siloxane prepolymer, in order to formulate a siloxane prepolymer liquid composition.