Optical sensor chip device and corresponding production method

摘要

An optical sensor chip device and a corresponding production method. The optical sensor chip device includes a substrate having a front side and a rear side; at least one first optical sensor chip for acquiring a first optical spectral range, the chip being attached to the substrate; and a first sealed cavern fashioned above an upper side of the first optical sensor chip. The first optical sensor chip is situated on a first side of the first cavern, and a first optical device is situated on an opposite, second side of the first cavern.

主权项

1. An optical sensor chip device, comprising:
a substrate having a front side and a rear side; at least one first optical sensor chip which is attached to the substrate to acquire a first optical spectral range; a first sealed cavern fashioned above an upper side of the first optical sensor chip, wherein the first optical sensor chip is situated on a first side of the first cavern, and a first optical device is situated on an opposite, second side of the first cavern; and a cap fashioned on the upper side of the optical sensor chip, the cap enclosing a hollow space having a vacuum.