| 摘要 |
Diagnostic system for checking internal defects of substrates includes a laser (LA), from which a narrow beam, dividers (D1 and D2), which divides the beam, spatial filters (PF1 and PF2) which beams extend in order to receive more width of the field, piezoelectric (PZT) to improve image quality, lens (W), mirror (Z), an infrared emitter (IT) for heating the object (P), a camera (K) for recording the interference pattern in digital form and notebook (N ) for digital reconstruction of the hologram (DH) using the numerical reconstruction algorithms. |
